Rational design of thermoelastic damping in microresonators with phase-lagging heat conduction law

Abstract The design of thermoelastic damping (TED) affected by the phase-lagging non-Fourier heat conduction effects becomes significant but challenging for enlarging quality factor widely-used microresonators operating in extreme situations, including ultra-high excitation frequency and ultra-low working temperature. However, there does not exist a rational method designing TED framework law. This work, therefore, proposes to achieve low dissipation governed equation motion are derived first, then problem is proposed. A topology optimization-based used resolve problem. What more, two-dimensional (2D) plain-strain-based finite element (FEM) developed as solver optimization process. Based on suggested technique, numerical instances with various phase lags investigated. results show that proposed can remarkably reduce tailoring their substructures.